An edition of Process, equipment, and materials control in integrated circuit manufacturing (1995)

Process, equipment, and materials control in integrated circuit manufacturing

25-26 October 1995, Austin, Texas

by

Cover of: Process, equipment, and materials control in integrated circuit manufacturing by Anant G. Sabnis
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Last edited by MARC Bot
July 18, 2024 | History
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An edition of Process, equipment, and materials control in integrated circuit manufacturing (1995)

Process, equipment, and materials control in integrated circuit manufacturing

25-26 October 1995, Austin, Texas

by

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Publish Date
Publisher
SPIE
Language
English
Pages
238

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Previews available in: English

Subjects

Congresses, Integrated circuits, Plasma etching, Integrated circuits industry, Metallizing, Manufacturing processes, Design and construction, Dielectric films
Edition Availability
Cover of: Process, equipment, and materials control in integrated circuit manufacturing
Process, equipment, and materials control in integrated circuit manufacturing: 25-26 October 1995, Austin, Texas
1995, SPIE
in English

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Book Details

Edition Notes

Includes bibliographic references and author index.

Published in
Bellingham, Wash
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 2637, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 2637.

Classifications

Dewey Decimal Class
621.3815
Library of Congress
TK7836 .P73 1995

The Physical Object

Pagination
vii, 238 p. :
Number of pages
238

Edition Identifiers

Open Library
OL819464M
Internet Archive
processequipment2637unse
ISBN 10
0819420034
LCCN
95070380
OCLC/WorldCat
33331897
Goodreads
1853523

Work Identifiers

Work ID
OL23574754W

Source records

Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

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July 18, 2024 Edited by MARC Bot import existing book
November 20, 2020 Created by MARC Bot import existing book