Process, equipment, and materials control in integrated circuit manufacturing

25-26 October 1995, Austin, Texas

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Last edited by MARC Bot
July 18, 2024 | History

Process, equipment, and materials control in integrated circuit manufacturing

25-26 October 1995, Austin, Texas

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Publish Date
Publisher
SPIE
Language
English
Pages
238

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Previews available in: English

Book Details


Edition Notes

Includes bibliographic references and author index.

Published in
Bellingham, Wash
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 2637, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 2637.

Classifications

Dewey Decimal Class
621.3815
Library of Congress
TK7836 .P73 1995

The Physical Object

Pagination
vii, 238 p. :
Number of pages
238

Edition Identifiers

Open Library
OL819464M
Internet Archive
processequipment2637unse
ISBN 10
0819420034
LCCN
95070380
OCLC/WorldCat
33331897
Goodreads
1853523

Work Identifiers

Work ID
OL23574754W

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History

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July 18, 2024 Edited by MARC Bot import existing book
May 23, 2023 Edited by ImportBot import existing book
November 20, 2020 Edited by MARC Bot import existing book
April 14, 2010 Edited by Open Library Bot Linked existing covers to the edition.
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record