An edition of Process, equipment, and materials control in integrated circuit manufacturing (1995)

Process, equipment, and materials control in integrated circuit manufacturing

25-26 October 1995, Austin, Texas

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Cover of: Process, equipment, and materials control in integrated circuit manufacturing by Anant G. Sabnis
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Last edited by MARC Bot
July 18, 2024 | History
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An edition of Process, equipment, and materials control in integrated circuit manufacturing (1995)

Process, equipment, and materials control in integrated circuit manufacturing

25-26 October 1995, Austin, Texas

by

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Publish Date
Publisher
SPIE
Language
English
Pages
238

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Previews available in: English

Subjects

Congresses, Integrated circuits, Plasma etching, Integrated circuits industry, Metallizing, Manufacturing processes, Design and construction, Dielectric films
Edition Availability
Cover of: Process, equipment, and materials control in integrated circuit manufacturing
Process, equipment, and materials control in integrated circuit manufacturing: 25-26 October 1995, Austin, Texas
1995, SPIE
in English

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Book Details

Edition Notes

Includes bibliographic references and author index.

Published in
Bellingham, Wash
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 2637, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 2637.

Classifications

Dewey Decimal Class
621.3815
Library of Congress
TK7836 .P73 1995

The Physical Object

Pagination
vii, 238 p. :
Number of pages
238

Edition Identifiers

Open Library
OL819464M
Internet Archive
processequipment2637unse
ISBN 10
0819420034
LCCN
95070380
OCLC/WorldCat
33331897
Goodreads
1853523

Work Identifiers

Work ID
OL23574754W

Source records

Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 18, 2024 Edited by MARC Bot import existing book
May 23, 2023 Edited by ImportBot import existing book
November 20, 2020 Edited by MARC Bot import existing book
April 14, 2010 Edited by Open Library Bot Linked existing covers to the edition.
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record