Vsli Electronics Microstructure Science

Lithography for Vlsi (VLSI electronics)

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Last edited by Open Library Bot
April 24, 2010 | History

Vsli Electronics Microstructure Science

Lithography for Vlsi (VLSI electronics)

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Publish Date
Publisher
Academic Pr
Language
English
Pages
361

Buy this book

Edition Availability
Cover of: Vsli Electronics Microstructure Science
Vsli Electronics Microstructure Science: Lithography for Vlsi (VLSI electronics)
September 1987, Academic Pr
in English
Cover of: Vsli Electronics Microstructure Science
Vsli Electronics Microstructure Science: Lithography for Vlsi (VLSI electronics)
September 1987, Academic Pr
Hardcover in English

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Book Details


The Physical Object

Format
Hardcover
Number of pages
361

Edition Identifiers

Open Library
OL9281291M
ISBN 10
0122341163
ISBN 13
9780122341168
Goodreads
5615650

Work Identifiers

Work ID
OL7939624W

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
April 24, 2010 Edited by Open Library Bot Fixed duplicate goodreads IDs.
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 14, 2010 Edited by Open Library Bot Linked existing covers to the edition.
December 15, 2009 Edited by WorkBot link works
April 30, 2008 Created by an anonymous user Imported from amazon.com record