An edition of Materials for Mechanical and Optical Microsystems (1997)

Materials for mechanical and optical microsystems

symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.

by , , and

Cover of: Materials for mechanical and optical microsystems by M. Elwenspoek, Ernst Obermeier, H. Fujita
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Last edited by MARC Bot
November 25, 2020 | History
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An edition of Materials for Mechanical and Optical Microsystems (1997)

Materials for mechanical and optical microsystems

symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.

by , , and

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Publish Date
Publisher
Materials Research Society
Language
English
Pages
242

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Previews available in: English

Subjects

Materials, research, Measure theory, Materials, Optical films, Electromechanical devices, Congresses, Microelectronics, Thin films
Edition Availability
Cover of: Materials for mechanical and optical microsystems
Materials for mechanical and optical microsystems: symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.
1997, Materials Research Society
in English

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Book Details

Edition Notes

Includes bibliographical references and indexes.

Published in
Pittsburgh, Pa
Series
Materials Research Society symposium proceedings ;, v. 444, Materials Research Society symposia proceedings ;, v. 444.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7870 .M384 1997

The Physical Object

Pagination
ix, 242 p. :
Number of pages
242

Edition Identifiers

Open Library
OL660800M
Internet Archive
isbn_1558993487_444
ISBN 10
1558993487
LCCN
97006201
OCLC/WorldCat
36407768
Goodreads
1469213

Work Identifiers

Work ID
OL21080164W

Source records

Better World Books record
Library of Congress MARC record
marc_columbia MARC record

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November 25, 2020 Edited by MARC Bot import existing book
August 4, 2020 Created by ImportBot import existing book