An edition of Microsystems engineering (2001)

Microsystems engineering

metrology and inspection : 20-21 June 2001, Munich, Germany

by

Cover of: Microsystems engineering by Christophe Gorecki
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Last edited by ImportBot
July 29, 2023 | History
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An edition of Microsystems engineering (2001)

Microsystems engineering

metrology and inspection : 20-21 June 2001, Munich, Germany

by

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Publish Date
Publisher
SPIE
Language
English
Pages
176

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Previews available in: English

Subjects

Microelectromechanical systems, Industrial applications, Microelectronics, Optical methods, Quality control, Congresses, Optical detectors, Interferometry
Edition Availability
Cover of: Microsystems engineering
Microsystems engineering: metrology and inspection : 20-21 June 2001, Munich, Germany
2001, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 4400, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4400.
Genre
Congresses.

Classifications

Dewey Decimal Class
620/.0044
Library of Congress
TS156.A1 M53 2001

The Physical Object

Pagination
v, 176 p. :
Number of pages
176

Edition Identifiers

Open Library
OL3579366M
ISBN 10
0819440957
LCCN
2002265278
OCLC/WorldCat
48781271
Goodreads
3309172

Work Identifiers

Work ID
OL19039403W

Source records

Scriblio MARC record
Library of Congress MARC record
Internet Archive item record

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History

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July 29, 2023 Edited by ImportBot import existing book
February 19, 2019 Created by MARC Bot import existing book