Optical micro- and nanometrology in microsystems technology II

8-10 April 2008, Strasbourg, France

Optical micro- and nanometrology in microsyst ...
Christophe Gorecki, Christophe ...
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December 16, 2010 | History

Optical micro- and nanometrology in microsystems technology II

8-10 April 2008, Strasbourg, France

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Publish Date
Publisher
SPIE
Language
English

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Book Details


Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE -- v. 6995, Proceedings of SPIE--the International Society for Optical Engineering -- v. 6995.

Classifications

Library of Congress
QC367 .O5892 2008, QC367.O5892 2008

The Physical Object

Pagination
1 v. (various pagings) :

Edition Identifiers

Open Library
OL24545099M
ISBN 10
0819471933
ISBN 13
9780819471932
LCCN
2010459262
OCLC/WorldCat
233830859

Work Identifiers

Work ID
OL15594271W

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December 16, 2010 Created by ImportBot initial import